This schema defines the Standardized JSON Header used for the meta data collection within the FA4.0 project. It defines each section as well es the properties of the General section, Method and Customer specific section as well as the Data Evaluation section where metadata of a measurement should be mapped to. The General Section is thereby identical for all tools. Meta data which represent a physical quantity are declared as objects and contain a 'Value' and 'Unit' as properties in the JSON header.
The general section incorporates general informational data about the measurement as well as the properties which are supported by every used tool. The section is thereby identically defined for all standard header.
The path to the generated file, linked to the json file.
The Name of the generated file, linked to the json file.
Indicates the file format.
The file size in [bytes]
The path to the created log file of the tool. Is left ommitted if there is no existing logfile.
Used standard for creation of header file
The version of the standard header type.
The time stamp, when the file was generated in ISO8601 format (YYYY-MM-DD hh:mm:ss). An add on indicates the differences to the Coordinated Universal Time (UTC), for example +01:00 for Central European Time (CET)
The manufacturer name of the measurement tool.
The name of the measurement tool.
The value is the unique manufacturer serial number of a measurement tool.
Indicates the analysis method.
The width of the image in pixel.
The height of the image in pixel.
The width of each pixel. The unit is specified under the property 'Unit' and should preferable be chosen in [nm].
The height of each pixel. The unit is specified under the property 'Unit' and should preferable be chosen in [nm].
The number of bits each pixel can resolute. For example a 8-bit depth in a grayscale image, means a resolution of 256 grayscales.
The amount of compressed bits per pixel.
The color mode of the image
The name of the respective company which performed the measurement.
The name of the used sample holder.
This key indicates if the tool is correctly calibrated. Value is 'true' for correctly calibrated.
The Coordinate Sub Section defines the coordinate handling in the json files. The screen coordinates are defined to be a right handed coordinate system with its origin on the top left of the screen. The x-coordinate increases to the right; y-coordinates are incremented from top to bottom. Having an image file, the saved tool coordinates for this file are defined to be in the center of the image. The properties can be used to transform the stage coordinates into screen coordinates, when analysing an image.
Indicates whether the tool's cartesian coordinate system is right or left handed.
This value indicates whether chained movements of the tool's stage are defined around a global fixed frame or around its local frame. True indicates that the stage moves around a global frame and false that it moves around its local frame.
This array describes the relative offset orientation of the tool's global frame to the screens coordinate frame. The first entry denotes the angle around the X-axis, the second around the Y-axis and the third around the Z-axis in degrees. The angles are relative to the tools global frame.
The three translational coordinates X, Y and Z of the tool's stage relative to the tool's global coordinate frame. The first entry denotes the X-coordinate and last denotes the Z-coordinate.
Rx is the vertical angle which describes the rotation of the tool's stage around a horizontal axis parallel to the x-axis of either the tool's global or local frame. The unit is specified under the property 'Unit' and should preferable be chosen in [degrees].
Ry is the vertical angle which describes the rotation of the tool's stage around a horizontal axis parallel to the y-axis of either the tool's global or local frame. The unit is specified under the property 'Unit' and should preferable be chosen in [degrees].
Rz is the horizontal angle which describes the rotation of the tool's stage around a vertical axis parallel to the z-axis of either the tool's global or local frame. The unit is specified under the property 'Unit' and should preferable be chosen in [degrees].
This subsection is reserved for parameter of the alignment marks of the universal sample holder
The offset vector for the calculation of the transformation matrix in the order of (X,Y,Z).
The coordinates of the 3 Alignment Marks relative to the tool's global coordinate frame.
Position of Alignment Mark1 in the order of (X,Y,Z).
Position of Alignment Mark2 in the order of (X,Y,Z).
Position of Alignment Mark3 in the order of (X,Y,Z).
Shape of the Alignment Marks.
Describes a size property of the fiducial. Example: the diameter for circles. The unit is specified under the property 'Unit' and should preferable be chosen in [µm].
The method specific section incorporates the all neccessary metadata for each measurement methods.
The Scanning Electron Microscopy subsection describes all specific SEM-metadata which are adjustable in each SEM device.
Indicates the previously applied supplementary method, e.g. sample preparation. Is left empty if no supplementary method is indicated.
The Accelerating Voltage describes the voltage at the cathode which generates the electric accelerating field. The unit is specified under the property 'Unit' and should preferable be chosen in [kV].
The Deccelerating Voltage describes a negative voltage which can be applied at the tool's stage, to deccelerate the beam before it hits the specimen for a lower landing voltage. The unit is specified under the property 'Unit' and should preferable be chosen in [kV].
The working distance, is defined as the distance between the objective lens and the focal plane or the final crossover point of the beam. The unit is specified under the property 'Unit' and should preferable be chosen in [mm].
The Magnification value indicates the magnification of the raster field.
Indicates if more Signals were mixed to generate the image. Equals true if Signal Mixing Mode is used.
The type(s) of signal used to generate the image.
No Additional ItemsThe type of detector(s) used by the tool to collect the electron signal.
No Additional ItemsDescribes the proportion of the used signal(s). The values are in the range of [0.0, 1.0].
No Additional ItemsThe size of the used aperture diameter. The unit is specified under the property 'Unit' and should preferable be chosen in [µm].
The relative centering of the aperture in x and y direction in the electron beam path. The first entry denotes the x-proportion and the second the y-proportion in the range of [-1.0, 1.0].
No Additional ItemsThe relative alignment of the magnetic field in the objective lens to form or shift the elctronic beam in X and Y direction. The first entry denotes the x-proportion and the second the y-proportion in the range of [-1.0, 1.0].
No Additional ItemsThe relative brightness of the image in the range of [0.0, 1.0]. A value of 1.0 corresponds to a white image and 0.0 to a black image. Brightness is an array, since for some devices the brightness can be ajdusted for each used detector which generated the image in a mixing mode.
No Additional ItemsThe relative contrast of the image in the range of [0.0, 1.0]. Higher values correspond to a high contrast. Constrast is an array, since for some devices the constrast can be ajdusted for each used detector which generated the image in a mixing mode.
No Additional ItemsThe value indicates the emitted current out of the electron gun. The unit is specified under the property 'Unit' and should preferable be chosen in [µA].
The value indicates the current which hits the specimen. The unit is specified under the property 'Unit' and should preferable be chosen in [pA].
Indicates if the high current mode is used. Equals true if high current mode is used
Indicates if the tilt correction mode is used to equalize the image. Equals true if the tilt correction mode is used
The corrected tilt value by tilt correction mode. The unit is specified under the property 'Unit' and should preferable be chosen in [degrees].
Shift of the electron beam in x-direction. The unit is specified under the property 'Unit' and should preferable be chosen in [µm].
Shift of the electron beam in y-direction. The unit is specified under the property 'Unit' and should preferable be chosen in [µm].
Indicates if the scan rotation mode is used to rotate the image. Equals true if scan rotation mode is used
The value indicates the angle of the scan direction relative to the tools global frame. The unit is specified under the property 'Unit' and should preferable be chosen in [degrees].
The Focused Ion Beam subsection describes all specific FIB-metadata which are adjustable in each FIB device.
Indicates the working distance where the electron and ion beam intersect for dual beam devices (equal to FIB-SEM coincedence point). The unit is specified under the property 'Unit' and should preferable be chosen in [mm].
Indicates the tilt value of the stage, where the stage is perpendicular to the FIB column. The unit is specified under the property 'Unit' and should preferable be chosen in [degrees].
The Accelerating Voltage describes the voltage at the cathode which generates the electric accelerating field. The unit is specified under the property 'Unit' and should preferable be chosen in [kV].
The Deccelerating Voltage describes a negative voltage which can be applied at the tool's stage, to deccelerate the beam before it hits the specimen for a lower landing voltage. The unit is specified under the property 'Unit' and should preferable be chosen in [kV].
The working distance, is defined as the distance between the objective lens and the focal plane or the final crossover point of the beam. The unit is specified under the property 'Unit' and should preferable be chosen in [mm].
The Magnification value indicates the magnification of the raster field.
Indicates if more Signals were mixed to generate the image. Equals true if Signal Mixing Mode is used.
The type(s) of signal used to generate the image.
No Additional ItemsThe type of detector(s) used by the tool to collect the electron signal.
No Additional ItemsDescribes the proportion of the used signal(s). The values are in the range of [0.0, 1.0].
No Additional ItemsThe size of the used aperture diameter. The unit is specified under the property 'Unit' and should preferable be chosen in [µm].
The relative centering of the aperture in x and y direction in the electron beam path. The first entry denotes the x-proportion and the second the y-proportion in the range of [-1.0, 1.0].
No Additional ItemsThe relative alignment of the magnetic field in the objective lens to form or shift the elctronic beam in X and Y direction. The first entry denotes the x-proportion and the second the y-proportion in the range of [-1.0, 1.0].
No Additional ItemsThe relative brightness of the image in the range of [0.0, 1.0]. A value of 1.0 corresponds to a white image and 0.0 to a black image. Brightness is an array, since for some devices the brightness can be ajdusted for each used detector which generated the image in a mixing mode.
No Additional ItemsThe relative contrast of the image in the range of [0.0, 1.0]. Higher values correspond to a high contrast. Constrast is an array, since for some devices the constrast can be ajdusted for each used detector which generated the image in a mixing mode.
No Additional ItemsThe value indicates the emitted current out of the ion gun. The unit is specified under the property 'Unit' and should preferable be chosen in [µA].
The value indicates the current which hits the specimen. The unit is specified under the property 'Unit' and should preferable be chosen in [pA].
Indicates if the high current mode is used. Equals true if high current mode is used
Indicates if the tilt correction mode is used to equalize the image. Equals true if the tilt correction mode is used
The corrected tilt value by tilt correction mode. The unit is specified under the property 'Unit' and should preferable be chosen in [degrees].
Shift of the electron beam in x-direction. The unit is specified under the property 'Unit' and should preferable be chosen in [µm].
Shift of the electron beam in y-direction. The unit is specified under the property 'Unit' and should preferable be chosen in [µm].
Indicates if the scan rotation mode is used to rotate the image. Equals true if scan rotation mode is used
The value indicates the angle of the scan direction relative to the tools global frame. The unit is specified under the property 'Unit' and should preferable be chosen in [degrees].
The Optical Microscopy subsection describes all specific metadata which are common in each Optical Microscopy device.
The objective Lens Magnification determines the factor by which the object is magnified by the obcetive lens relative to its actual size.
The Optical Zoom is the magnification factor created in the tube of the objective.
The Digital Zoom value is the factor by which the image is digitally magnified, by cropping and resizing the original image.
Specifies with which method the sample has been illuminated, to create the image.
Indicates if the HDR (High Dynamic Range) Mode is used. Is true if HDR Mode was on.
The exposure time determines the duration that the detector of the microscope is exposed to the reflected light. The value is preferable given in [ms].
The tool specific section contains the metadata which are specific for a tool.
The Tescan XEIA3 sub section contains the metadata which is specific for the Tescan XEIA3 and not listed in the standard method specific section.
The ZEISS GeminiSEM 500 sub section contains the metadata which is specific for the ZEISS GeminiSEM 500 and not listed in the standard method specific section.
ZEISS LEO Gemini 1550 sub section contains the metadata which is specific for the ZEISS LEO Gemini 1550 and not listed in the standard method specific section.
ZEISS LEO Gemini 1560 sub section contains the metadata which is specific for the ZEISS LEO Gemini 1560 and not listed in the standard method specific section.
The ZEISS Gemini ULTRA 55 sub section contains the metadata which is specific for the ZEISS Gemini ULTRA 55 and not listed in the standard method specific section.
The ZEISS Gemini SUPRA 55 sub section contains the metadata which is specific for the ZEISS Gemini SUPRA 55 and not listed in the standard method specific section.
The HITACHI SU8000 sub section contains the metadata which is specific for the HITACHI SU8000 and not listed in the standard method specific section.
The HITACHI SU8200 sub section contains the metadata which is specific for the HITACHI SU8200 and not listed in the standard method specific section.
The FEI Magellan 400 sub section contains the metadata which is specific for the FEI Magellan 400 and not listed in the standard method specific section.
The Olympus DSX110 sub section contains the metadata which is specific for the Olympus DSX110 and not listed in the standard method specific section.
The Olympus DSX500 sub section contains the metadata which is specific for the Olympus DSX500 and not listed in the standard method specific section.
The Olympus DSX1000 sub section contains the metadata which is specific for the Olympus DSX1000 and not listed in the standard method specific section.
The customer specific section contains specific meta data defined by a customer.
The Infineon subsection contains specific metadata defined by the customer Infineon.
The Data Evaluation section contains metadata about a measurement evaluation.
The label to the image. The image label can for example be an image caption or represent a failure mode and takes any string.
The unique ID to the image.
.POI (point of interest) is an array which contains all the 0-N POIs selected by the user. One POI is a point on the image, defined by its name and (x, y)-coordinates.
No Additional ItemsThe name of the specific POI which can be any string.
The label cathegorizes the selected POI to a certain class. The class should represent a certain failure mode.
Unique ID to the labeled POI.
(x, y) coordinates of the specific POI in the tools coordinate frame. The first element denotes the x-coordinate and the second the y-coordinate. The unit is specified under the property 'Unit'.
Must contain a maximum of 2 items
An ROI is any by the user segmented area in the image. This subsection contains metadata of each type of ROIs which were segmented by the user. It provides information like area of the ROI or coordinate of points that frame the region of the ROI.
ROI-Polygon is an array which contains all ROI-Polygons selected by the user. A polygon is any drawn plane consisting of vertices selected by the user, which are connected over straight lines to form a closed area. ROI-Polygon contains the name of the polygon, the coordinates of the vertices, the area of the closed polygon, the filling color as well as color and width of the stroke.
No Additional ItemsThe label cathegorizes the segmented ROI-Polygon to a certain class. The class should represent a certain failure mode.
Unique ID to the labeled ROI-Polygon.
Represents an N x 2 matrix whose rows contain the x and y coordinates in the tools coordinate frame of the vertices which define the polygon. The vertices are connected over straight lines and are rudimentary numbered from the first row (first vertice coordinate of the polygon) to the bottom row which represents the last vertice which is also connected to the first vertice to close the polygon. In the json format the matrix is defined as an array of arrays. The unit is specified under the property 'Unit'.
Must contain a maximum of 2 items
The area of the drawn polygon in the unit of the tools coordinate frame. The unit is specified under the property 'Unit'.
The fill color of the polygon encoded in RGBA.
Must contain a minimum of 4 items
Must contain a maximum of 4 items
The color of the stroke the polygon was drawn with, encoded in RGB.
Must contain a minimum of 3 items
Must contain a maximum of 3 items
The width of the stroke. The unit is specified under the property 'Unit' and should preferable be chosen in pixels.
ROI-Polyline is an array which contains all ROI-Polylines selected by the user. A polyline is specified by an array of vertices that are connected over straight lines. The first vertice is the starting point and the last vertice the end point of the polyline (an arrowhed marker is applied to the end of the line). ROI-Polyline contains the name of the polyline, the coordinates of the vertices as well as color and width of the stroke.
No Additional ItemsThe name of the specific polyline which can be any string.
The label cathegorizes the segmented polyline to a certain class. The class should represent a certain failure mode.
Unique ID to the labeled polyline.
Represents an N x 2 matrix whose rows contain the x and y coordinates in the tools coordinate frame of the vertices which define the polyline. The vertices are connected over straight lines and are rudimentary numbered from the first row (start point of the polyline) to the bottom row which represents the endpoint of the line (arrowhead marker is applied to the end of the line). In the json format the matrix is defined as an array of arrays. The unit is specified under the property 'Unit'.
Must contain a maximum of 2 items
The color of the stroke the polyline was drawn with, encoded in RGB.
Must contain a minimum of 3 items
Must contain a maximum of 3 items
The width of the stroke. The unit is specified under the property 'Unit' and should preferable be chosen in pixels.
The History section is intended to store data of pevious related measurements or images. Like the link to the previous Header file.